| MBE
|
| PLD
|
| PLD (Pnictide)
|
| PLD (Pnictide)#2
|
| PLD (Chalcogenide)
|
| PLD (Oxide)#1
|
| PLD (Oxide)#2
|
| PLD (Oxide)#3
|
| PLD-MBE Composite
|
| EB deposition#1
|
| EB deposition#2
|
| Res.-heating evaporation
|
| UHV Sputtering
|
| Sputtering (IGZO)
|
| Sputtering (metal electrodes)
|
| Excimer laser (KrF, ArF)
|
| High-power Nd:YAG laser
|
| Dry etching
|
| Mask aligner
|
| Spin coater
|
| EB lithography
|
| Ozone cleaner
|
| High-speed furnace
|
| Muffle furnace
|
| High-T furnace
|
| Tube furnace
|
| IR heating system
|
| Rapid thermal annealing
|
| UHV annealing system
|
| Supercritical CO2 processing
|
| CMP
|
| Wire bonder
|
| Globe box
|
| CIP
|
| SPS
|
| Ball milling
|
| Lapping&Polishing
|