 | MBE
|
 | PLD
|
 | PLD (Pnictide)
|
 | PLD (Pnictide)#2
|
 | PLD (Chalcogenide)
|
 | PLD (Oxide)#1
|
 | PLD (Oxide)#2
|
 | PLD (Oxide)#3
|
 | PLD-MBE Composite
|
 | EB deposition#1
|
 | EB deposition#2
|
 | Res.-heating evaporation
|
 | UHV Sputtering
|
 | Sputtering (IGZO)
|
 | Sputtering (metal electrodes)
|
 | Excimer laser (KrF, ArF)
|
 | High-power Nd:YAG laser
|
 | Dry etching
|
 | Mask aligner
|
 | Spin coater
|
 | EB lithography
|
 | Ozone cleaner
|
 | High-speed furnace
|
 | Muffle furnace
|
 | High-T furnace
|
 | Tube furnace
|
 | IR heating system
|
 | Rapid thermal annealing
|
 | UHV annealing system
|
 | Supercritical CO2 processing
|
 | CMP
|
 | Wire bonder
|
 | Globe box
|
 | CIP
|
 | SPS
|
 | Ball milling
|
 | Lapping&Polishing
|